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Investigation of the titanium silicide formation in plasma activated physical vapour deposition

โœ Scribed by H. Wulff; J. Klimke; H. Steffen; C. Eggs


Book ID
108388859
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
631 KB
Volume
261
Category
Article
ISSN
0040-6090

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