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Investigation of the nucleation mechanism in bias-enhanced diamond deposition on silicon and molybdenum

✍ Scribed by P. Reinke; P. Kania; P. Oelhafen

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 672 KB
Volume: 270
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06850-3

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