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Investigation of Si-SiO2interface properties for bonded silicon-on-insulator

✍ Scribed by Ching-Fa Yeh; Hsueh-Wu Kao; Bao-Shin Chang; Kuan-Lun Chang

Publisher
Springer
Year
1993
Tongue
English
Weight
341 KB
Volume
12
Category
Article
ISSN
0261-8028

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