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Investigation of nanocrystallization of a-Si1−xGex:H thin films diluted with argon in the PECVD system

✍ Scribed by Xu, Rui; Li, Wei; He, Jian; Sun, Yan; Jiang, Ya-Dong

Book ID: 123072203
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 891 KB
Volume: 365
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2013.01.026

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