✦ LIBER ✦
Dependence of a-Sl:H/Si3N4 interface properties on the deposition sequence in amorphous silicon thin film transistor produced by remote PECVD process
✍ Scribed by S.S. Kim; G.N. Parsons; G.G. Fountain; G. Lucovsky
- Book ID
- 115986839
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 203 KB
- Volume
- 115
- Category
- Article
- ISSN
- 0022-3093
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