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Investigation of iridium as a gate electrode for deep sub-micron CMOS technology

✍ Scribed by M.A Pawlak; T Schram; K Maex; A Vantomme


Book ID
108411326
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
246 KB
Volume
70
Category
Article
ISSN
0167-9317

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