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Investigation of ion-implanted semiconductors by ellipsometry and backscattering spectrometry

✍ Scribed by M. Fried; T. Lohner; E. Jároli; Gy. Vizkelethy; G. Mezey; J. Gyulai; M. Somogyi; H. Kerkow


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
376 KB
Volume
116
Category
Article
ISSN
0040-6090

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