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Investigation of Ge and C layer deposition on a Si substrate using SIMS profiling

✍ Scribed by V. S. Kharlamov; D. V. Kulikov; Yu. V. Trushin; P. Nader; P. Mazri; Th. Stauden; J. Pezoldt


Book ID
111501700
Publisher
Allerton Press Inc
Year
2010
Tongue
English
Weight
193 KB
Volume
74
Category
Article
ISSN
1062-8738

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