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Investigation of distribution and redistribution of silicon in thin doped gallium-arsenide layers grown by molecular beam epitaxy on substrates with (100), (111)Ga, and (111)As orientations

✍ Scribed by G. B. Galiev; V. É. Kaminskii; V. G. Mokerov; V. K. Nevolin; V. V. Saraikin; Yu. V. Slepnev


Book ID
110120416
Publisher
Springer
Year
2000
Tongue
English
Weight
126 KB
Volume
34
Category
Article
ISSN
1063-7826

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Silicon and carbontetrabromide were used as dopant sources in the growth of GaAs/GaAs and Gao.47Inf).s3As/ lnP structures. We studied the incorporation behaviour of these group IV atoms on (100) and {111} surfaces as a function of growth temperature. The free carrier concentrations determined by Hal