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Investigation of diamond growth in a new planar microwave plasma source

✍ Scribed by A. Ohl; M. Schmidt

Book ID
107930168
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
786 KB
Volume
47
Category
Article
ISSN
0257-8972

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We have studied the growth of diamond films from microwave plasma using gas mixtures of CH,-CO, (not previously reported in the literature) onto Si substrates. The diamond phase is obtained in the molar ratio .range 0.7 <CO,/ CH, G 1.38 -C 0.05, in close agreement with the empirical model of Bachman