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Investigation of plasma surface cleaning in planar low-pressure microwave discharges

✍ Scribed by A. Ohl; H. Strobel; J. Röpcke; H. Kammerstetter; A. Pries; M. Schneider


Book ID
107930509
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
378 KB
Volume
74-75
Category
Article
ISSN
0257-8972

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