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The kinetics of a diamond-like film growth in a microwave gas discharge plasma

✍ Scribed by S. Yu. Suzdal’tsev; R. K. Yafarov


Book ID
110127869
Publisher
SP MAIK Nauka/Interperiodica
Year
2001
Tongue
English
Weight
39 KB
Volume
27
Category
Article
ISSN
1063-7850

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