Formation of a diamond-like phase under conditions of preferential deposition of nondiamond carbon in a microwave gas discharge plasma with electron cyclotron resonance

✍ Scribed by S. Yu. Suzdal’tsev; S. V. Sysuev; R. K. Yafarov

• Book ID: 110123512
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 1998
• Tongue: English
• Weight: 242 KB
• Volume: 24
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1262024