✦ LIBER ✦

Investigation of defects in reactive ion-implanted silicon

✍ Scribed by G. Bhatt; A.D. Yadav; S.K. Dubey; T.K. Gundu Rao

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Interstitial type defects in ion implant

✍ Berezhnov, N. I. ;Stelmakh, V. F. ;Chelyadinskii, A. R. 📂 Article 📅 1983 🏛 John Wiley and Sons 🌐 English ⚖ 245 KB

An ellipsometric investigation of ion im

✍ Gabriela Popescu; Ioan Boca 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 214 KB

Oxygen-related vacancy-type defects in i

✍ Pi, X D; Burrows, C P; Coleman, P G; Gwilliam, R M; Sealy, B J 📂 Article 📅 2003 🏛 Institute of Physics 🌐 English ⚖ 206 KB

Defect evolution in MeV ion-implanted si

✍ J. Lalita; N. Keskitalo; A. Hallén; C. Jagadish; B.G. Svensson 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 648 KB

Ion-implantation associated defect produ

✍ J.R. Troxell 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 882 KB

Investigation of Ion Implanted Silicon b

✍ Gavrilenko, V. I. ;Klyui, N. I. ;Litovchenko, V. G. ;Romanyuk, B. N. 📂 Article 📅 1989 🏛 John Wiley and Sons 🌐 English ⚖ 401 KB