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Investigation of 4H-SiC epitaxial layers implanted by Al ions

✍ Scribed by E. V. Kolesnikova; E. V. Kalinina; A. A. Sitnikova; M. V. Zamoryanskaya

Book ID: 110203084
Publisher: Pleiades Publishing
Year: 2009
Tongue: English
Weight: 307 KB
Volume: 3
Category: Article
ISSN: 1027-4510
DOI: 10.1134/s1027451009030136

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