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Intrinsic SiC/SiO2 Interface States

✍ Scribed by Afanasev, V. V. ;Bassler, M. ;Pensl, G. ;Schulz, M.


Publisher
John Wiley and Sons
Year
1997
Tongue
English
Weight
341 KB
Volume
162
Category
Article
ISSN
0031-8965

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Optical properties of SIC/SIO2 composite
✍ Jian Yi; XiaoDong He; Yue Sun; Yao Li πŸ“‚ Article πŸ“… 2007 πŸ› John Wiley and Sons 🌐 English βš– 217 KB

## Abstract SiC film was deposited by electron beam‐physical vapor deposition on thermal oxidized silicon substrates at 750Β°C, and SiC/SiO~2~ composite thin film was prepared. The obtained composite film was analyzed by Fourier‐transform infrared (FTIR) transmission and reflection spectroscopy, and