✦ LIBER ✦

Optical properties of SIC/SIO2 composite thin film

✍ Scribed by Jian Yi; XiaoDong He; Yue Sun; Yao Li

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 217 KB
Volume: 49
Category: Article
ISSN: 0895-2477
DOI: 10.1002/mop.22487

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✦ Synopsis

Abstract

SiC film was deposited by electron beam‐physical vapor deposition on thermal oxidized silicon substrates at 750°C, and SiC/SiO~2~ composite thin film was prepared. The obtained composite film was analyzed by Fourier‐transform infrared (FTIR) transmission and reflection spectroscopy, and the film reveals an amorphous structure and a high emissivity.© 2007 Wiley Periodicals, Inc. Microwave Opt Technol Lett 49: 1551–1553, 2007; Published online in Wiley InterScience (www.interscience.wiley.com). DOI 10.1002/mop.22487

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