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Intrinsic band edge traps in nano-crystalline HfO2 gate dielectrics

✍ Scribed by G. Lucovsky; Y. Zhang; J. Luning; V.V. Afanase’v; A. Stesmans; S. Zollner; D. Triyoso; B.R. Rogers; J.L. Whitten


Book ID
104050344
Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
319 KB
Volume
80
Category
Article
ISSN
0167-9317

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