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Control of Interface Traps in HfO2Gate Dielectric on Silicon

✍ Scribed by S. Y. Tan

Book ID: 107457004
Publisher: Springer US
Year: 2010
Tongue: English
Weight: 558 KB
Volume: 39
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-010-1323-0

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