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Internal stress reduction in diamond like carbon thin films by ion irradiation

✍ Scribed by D.H Lee; S Fayeulle; K.C Walter; M Nastasi

Book ID: 114170687
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 114 KB
Volume: 148
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(98)00739-3

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