## Abstract The precipitation of Mn rich phases in ZnO layers deposited by magnetron sputtering has been investigated as well as the precipitates influence on the magnetic properties. On top of sapphire (0001) substrates, the formation of Mn rich precipitates is observed following the deposition of
β¦ LIBER β¦
Interfacial diffusion and precipitation in rf magnetron sputtered (Mn)ZnO layers
β Scribed by Ruterana, P. ;Abouzaid, M.
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 562 KB
- Volume
- 203
- Category
- Article
- ISSN
- 0031-8965
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β¦ Synopsis
Abstract
This report presents TEM results obtained on ZnO layers doped with 10% Mn, deposited at 550 Β°C and subsequently annealed at 800 Β°C in air. Mn rich precipitates form inside the doped areas and a Mn containing interface phase appears at the ZnO/sapphire interface, following Mn diffusion and reaction. The interface phase is polycrystalline, some patches have been identified as trimetallic (ZnAlMn)O of cubic structure. (Β© 2006 WILEYβVCH Verlag GmbH & Co. KGaA, Weinheim)
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