✦ LIBER ✦
Pressure and angle of incidence effects in reactive planar magnetron sputtered ZnO layers: S Maniv et al, J Vac Sci Technol, 20 (2), 1982, 162–170
- Publisher
- Elsevier Science
- Year
- 1983
- Tongue
- English
- Weight
- 175 KB
- Volume
- 33
- Category
- Article
- ISSN
- 0042-207X
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