𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Formation of precipitates in Mn doped ZnO layers deposited by magnetron sputtering

✍ Scribed by Abouzaid, M. ;Ruterana, P. ;Liu, C. ;Morkoç, H.

Publisher
John Wiley and Sons
Year
2007
Tongue
English
Weight
420 KB
Volume
204
Category
Article
ISSN
0031-8965

No coin nor oath required. For personal study only.

✦ Synopsis

Abstract

The precipitation of Mn rich phases in ZnO layers deposited by magnetron sputtering has been investigated as well as the precipitates influence on the magnetic properties. On top of sapphire (0001) substrates, the formation of Mn rich precipitates is observed following the deposition of Zn(Mn)O layers above 500 °C, the size of the precipitates is shown to increase with the Mn concentration. For Zn(Mn)O layers deposited on GaN in similar conditions, no precipitates have been seen to form, however the quality of layers highly improved when the temperature was brought down to 500 °C. At this optimal temperature, the measured magnetic properties are best in layers deposited on both substrates, such layers do not contain any of the observed Mn rich precipitates. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

📜 SIMILAR VOLUMES

Interfacial diffusion and precipitation
Interfacial diffusion and precipitation in rf magnetron sputtered (Mn)ZnO layers
✍ Ruterana, P. ;Abouzaid, M. 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 562 KB

## Abstract This report presents TEM results obtained on ZnO layers doped with 10% Mn, deposited at 550 °C and subsequently annealed at 800 °C in air. Mn rich precipitates form inside the doped areas and a Mn containing interface phase appears at the ZnO/sapphire interface, following Mn diffusion a

Manganese behaviour in ZnO layers deposi
Manganese behaviour in ZnO layers deposited by magnetron sputtering for spintronic application
✍ Abouzaid, M. ;Ruterana, P. ;Liu, C. ;Morkoç, H. 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 172 KB

## Abstract In this work, we carry out structural analysis of ferromagnetic Mn‐doped ZnO thin films deposited by radio frequency magnetron sputtering, using transmission electron microscopy (TEM). On top of sapphire (0001) substrates, Mn rich precipitates and an interface reaction layer are observe

Optimization of aluminum-doped ZnO thin-
Optimization of aluminum-doped ZnO thin-film deposition by magnetron sputtering for liquid crystal display applications
✍ Minami, Tadatsugu ;Miyata, Toshihiro ;Ohtani, Yuusuke 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 236 KB

## Abstract This paper describes the optimization of ZnO:Al (AZO) thin films formed by a magnetron sputtering method for the purpose of creating a substitute for the indium‐tin‐oxide (ITO) transparent electrodes used in liquid crystal display (LCD) applications. New AZO thin‐film preparation techni