Apart from conventional parallel plate capacitors, the coplanar capacitor is another useful structure for ferroelectric film-based devices. In this work, barium strontium titanate (BST) thin film-based interdigital capacitors were prepared under different conditions. The relative permittivity of the
โฆ LIBER โฆ
Interfacial characteristic of (Ba,Sr)TiO3thin films deposited on different bottom electrodes
โ Scribed by Jinzhao Wang; Tianjin Zhang; Baishun Zhang; Juan Jiang; Ruikun Pan; Zhijun Ma
- Publisher
- Springer US
- Year
- 2009
- Tongue
- English
- Weight
- 359 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0957-4522
No coin nor oath required. For personal study only.
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