Characterization of (Ba,Sr)TiO3 thin-film capacitors with Ir bottom electrodes and its improvement by plasma treatment
✍ Scribed by Dong-Sing Wuu; Ray-Hua Horng; Chin-Ching Lin; Yan-Hong Liu
- Publisher
- Elsevier Science
- Year
- 2003
- Tongue
- English
- Weight
- 220 KB
- Volume
- 66
- Category
- Article
- ISSN
- 0167-9317
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✦ Synopsis
Ba, Sr)TiO (BST) thin-film capacitors with Ir bottom electrodes are recognized to have higher polarization 3 and leakage current as compared to those with conventional Pt electrodes. This paper describes a method to improve the leakage current of BST / Ir films by high-density plasma surface treatment using O ? N O or NH 2 2 3 gas in an inductively coupled plasma system. It is found that the leakage current density can be reduced by two orders of magnitude using O plasma treatment. The dielectric constants were very closely to the reference 2 sample except for NH plasma treated sample. The O and N O plasma can enhance the lifetime than 10 years 3 2 2 at 1.2 V for the Pt /(Ba,Sr)TiO / Ir capacitors. It is necessary to trade off the capacitance property for leakage 3 current property.