Characteristics of ZnO thin film deposited on various metal bottom electrodes
โ Scribed by Young Ah Jeon; Kwang Soo No; Jong Sung Kim; Young Soo Yoon
- Publisher
- TechnoPress
- Year
- 2003
- Tongue
- English
- Weight
- 440 KB
- Volume
- 9
- Category
- Article
- ISSN
- 1598-9623
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Zinc oxide (ZnO) is extensively studied because of its potential applications in various fields, such as surface acoustic wave (SAW) devices, solar cells, light emitting diodes (LEDs) and laser systems. The stoichiometric ZnO films are electrical insulation and have high piezoelectric properties, wh
ZnO thin films were deposited on R-Al 2 O 3 substrates by reactive RF magnetron sputtering in an Ar + O 2 mixture using a Zn metal target at a substrate temperature of 300 ยฐC. ZnO thin films deposited on R-Al 2 O 3 substrates showed (1 1 0) orientation. C-axis-oriented EuBCO thin films were grown by