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Integration of as High- Dielectric on Strained and Unstrained SOI MOSFETs With a Replacement Gate Process

✍ Scribed by Özben, E.D.; Lopes, J.M.J.; Nichau, A.; Schnee, M.; Lenk, S.; Besmehn, A.; Bourdelle, K.K.; Zhao, Q.T.; Schubert, J.; Mantl, S.

Book ID: 118747627
Publisher: IEEE
Year: 2011
Tongue: English
Weight: 453 KB
Volume: 32
Category: Article
ISSN: 0741-3106
DOI: 10.1109/LED.2010.2089423

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