✦ LIBER ✦

Integrated processing of stacked-gate heterostructures: plasma-assisted low temperature processing combined with rapid thermal high-temperature processing

✍ Scribed by V. Misra; S. Hattangady; X-L Xu; M.J. Watkins; B. Hornung; G. Lucovsky; J.J. Wortman; U. Emmerichs; C. Meyer; K. Leo; H. Kurz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low temperature preparation of piezoelec

✍ L. Pardo; R. Poyato; A. González; M.L. Calzada 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 259 KB

Interfacial layer optimization of high-k

✍ Barry P. Linder; Vijay Narayanan; Eduard A. Cartier 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 330 KB

Integration of wet-chemical processing w

✍ T. Yasuda; C.H. Bjorkman; Y. Ma; Z. Lu; G. Lucovsky; U. Emmerichs; C. Meyer; K. 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 541 KB

98/04270 Design of a high-temperature he

📂 Article 📅 1998 🏛 Elsevier Science ⚖ 216 KB