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Infrared-spectroscopic investigation of sputtered a-Si56Ge44:N:H films

✍ Scribed by T. Drüsedau; H. Fiedler; H. Sobotta; V. Riede


Book ID
115988118
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
397 KB
Volume
135
Category
Article
ISSN
0022-3093

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