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Infrared and ellipsometric studies of reactive-ion-beam-sputtered hydrogenated amorphous silicon (a-Si:H), germanium (a-Ge:H) and SiGe alloy (a-Si28Ge72:H) films—a correlation

✍ Scribed by Mohan Krishan Bhan; L.K. Malhotra; Subhash C. Kashyap

Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
540 KB
Volume
197
Category
Article
ISSN
0040-6090

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