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Infrared ellipsometry study of the vibrational properties of a-Si:H, a-SiC:H and a-SiGe:H ultrathin films

✍ Scribed by R. Benferhat; B. Drevillon


Book ID
115986046
Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
159 KB
Volume
97-98
Category
Article
ISSN
0022-3093

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