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Complex study of mechanical properties of a-Si:H and a-SiC:H boron doped films

✍ Scribed by Vilma Buršíková; Petr Sládek; Pavel St’ahel; Jiří Buršík


Book ID
116669058
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
165 KB
Volume
352
Category
Article
ISSN
0022-3093

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