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Influences of the deposition rate on the microstructure and hardness of composite films prepared by reactive ion-assisted coevaporation

✍ Scribed by Tsai, Rung-Ywan

Book ID
115447297
Publisher
The International Society for Optical Engineering
Year
1995
Tongue
English
Weight
599 KB
Volume
34
Category
Article
ISSN
0091-3286

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Effect of the deposition rate on ITO thi
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✍ Meng, Li-Jian ;Teixeira, V. ;dos Santos, M. P. πŸ“‚ Article πŸ“… 2010 πŸ› John Wiley and Sons 🌐 English βš– 507 KB

## Abstract Indium tin oxide (ITO) thin films have been deposited onto glass substrates at room temperature by ion beam assisted deposition technique at different deposition rates (0.1–0.3 nm/s). The effects of the deposition rate on the structural, optical and electrical properties of the deposite