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Influence of vacuum rapid thermal annealing on some properties of quartz resonators

✍ Scribed by L Spassov; V Lazarova; G Beshkov; L Vergov; Tz Angelov

Book ID
108390435
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
205 KB
Volume
51
Category
Article
ISSN
0042-207X

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Influence of vacuum rapid thermal anneal
Influence of vacuum rapid thermal annealing on the properties of Al and Ag films on quartz
✍ V Lasarova; G Beshkov; L Spassov πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 364 KB

The influence of rapid thermal annealing of 700Β°C and 800Β°C in 5x 10e5 mbar vacuum on the structure and morphology of aluminum and silver thin films, deposited on quartz substrates is investigated. The metal films studied have thicknesses of 200 nm and 120 nm for AI and Ag, respectively, when the a