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Dielectric properties of implanted silicon layers: Influence of rapid thermal annealing

✍ Scribed by J. Partyka; P. Węgierek; P. Żukowski; Yu. Sidorenko; Yu. Szostak

Book ID: 114166148
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 209 KB
Volume: 197
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(02)01304-6

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