𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Influence of the ion irradiation on the properties of β-FeSi2 layers prepared by ion beam assisted deposition

✍ Scribed by N.P. Barradas; D. Panknin; E. Wieser; B. Schmidt; M. Betzl; A. Mücklich; W. Skorupa


Book ID
114168816
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
484 KB
Volume
127-128
Category
Article
ISSN
0168-583X

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Effect of beam voltage on the properties
✍ J. H. Edgar; C. A. Carosella; C. R. Eddy; D. T. Smith 📂 Article 📅 1996 🏛 Springer US 🌐 English ⚖ 709 KB

The effects of nitrogen-beam voltage on the structure, stress, energy band gap and hardness of AIN thin films deposited on Si (1 1 1), Si (1 00) and sapphire (0001) by ion beam assisted deposition (IBAD) are reported. As the nitrogen-beam voltage was increased from 50 to 200 V, the stress and disord