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Influence of the depth resolution on the resulting AES profiles of components in multilayer thin film structures

✍ Scribed by J.P. Petrakian; P. Renucci

Book ID: 118362523
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 748 KB
Volume: 195
Category: Article
ISSN: 0039-6028
DOI: 10.1016/0039-6028(88)90787-x

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