๐”– Bobbio Scriptorium
โœฆ   LIBER   โœฆ

Influence of substrate temperature on the materials properties of reactive DC magnetron sputtered Ti/TiN multilayered thin films

โœ Scribed by B. Subramanian; R. Ananthakumar; V.S. Vidhya; M. Jayachandran

Book ID
108215808
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
998 KB
Volume
176
Category
Article
ISSN
0921-5107

No coin nor oath required. For personal study only.

๐Ÿ“œ SIMILAR VOLUMES

Effect of substrate temperature on the p
Effect of substrate temperature on the physical properties of dc magnetron sputtered Cu2O films
โœ Sivasankar Reddy, A. ;Sreedhara Reddy, P. ;Uthanna, S. ;Venkata Rao, G. ;Klein, ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 393 KB

## Abstract Cuprous oxide (Cu~2~O) films were formed by dc reactive magnetron sputtering onto glass substrates held at various temperatures in the range 303โ€“648 K. The substrate temperature was found to be an important parameter in controlling the physical properties of the deposited films. The var