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Electrical properties of DC reactively sputtered TiN thin films on p-silicon substrates

โœ Scribed by Narsale, A. M. ;Elena, M. ;Guzman, L. ;Miotello, A. ;Furlan, G.

Publisher
John Wiley and Sons
Year
1994
Tongue
English
Weight
252 KB
Volume
143
Category
Article
ISSN
0031-8965

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