Morphological, electrical and optical properties of sputtered Mo thin films on flexible substrates

✍ Scribed by Bollero, A. ;Andrés, M. ;García, C. ;Abajo, J. de ;Gutiérrez, M. T.

• Publisher: John Wiley and Sons
• Year: 2009
• Tongue: English
• Weight: 801 KB
• Volume: 206
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200824405

✦ Synopsis

Abstract

Molybdenum (Mo) films were deposited onto Kapton^®^ substrates with different thickness by dc‐magnetron sputtering in order to be used as back contact layer in flexible solar cells. The morphology, electrical resistance and reflectance of the films have been studied as a function of the deposition parameters and the thickness of the polymer films. The lowest resistivity and highest reflectance have been obtained for those films deposited at a reduced working gas pressure of 0.6 Pa. The evolution of these properties is shown to be strongly dependent on the microstructure of the films. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)