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Influence of Sputtering Pressure on the Structure and Mechanical Properties of Nanocomposite Ti-Si-N Thin Films

✍ Scribed by Vipin Chawla; R. Jayaganthan; Ramesh Chandra

Book ID: 117695014
Publisher: Allerton Press Inc
Year: 2010
Tongue: English
Weight: 673 KB
Volume: 26
Category: Article
ISSN: 1005-0302
DOI: 10.1016/s1005-0302(10)60105-3

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