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Evolution of enhanced crystallinity and mechanical property of nanocomposite Ti–Si–N thin films using magnetron reactive co-sputtering

✍ Scribed by C.K. Chung; H.C. Chang; S.C. Chang; M.W. Liao

Book ID: 116609322
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 633 KB
Volume: 537
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2012.05.018

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