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Influence of porosity on electrical properties of low-k dielectrics

✍ Scribed by Els Van Besien; Marianna Pantouvaki; Larry Zhao; David De Roest; Mikhail R. Baklanov; Zsolt Tőkei; Gerald Beyer

Book ID: 113797781
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 384 KB
Volume: 92
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2011.04.015

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