✦ LIBER ✦
Mechanical properties of high porosity low- k dielectric nano-films determined by Brillouin light scattering
✍ Scribed by Bailey, S; Mays, E; Michalak, D J; Chebiam, R; King, S; Sooryakumar, R
- Book ID
- 120460203
- Publisher
- Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 482 KB
- Volume
- 46
- Category
- Article
- ISSN
- 0022-3727
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