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Influence of plasma power and substrate temperature on structure of nanocrystalline germanium carbon thin films by VHF plasma CVD

✍ Scribed by Yasutoshi Yashiki; Seiichi Kouketsu; Shinsuke Miyajima; Akira Yamada; Makoto Konagai


Book ID
116671011
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
211 KB
Volume
354
Category
Article
ISSN
0022-3093

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