Influence of Dislocations on NitrogenโOx
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Yang, Deren ;Que, Duanlin
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Article
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1999
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John Wiley and Sons
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English
โ 119 KB
๐ 2 views
The influence of dislocations on nitrogenยฑoxygen (NยฑO) complexes in nitrogen-doped Czochralski (NCZ) silicon was investigated. It was found that NยฑO complexes were generated during annealing at 650 C for 10 min. In the early stage of annealing the amount of the NยฑO complexes in NCZ silicon with disl