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Influence of nickel precipitation on the formation of denuded zone in Czochralski silicon

✍ Scribed by Jin Xu; Yongzhi Wang; Deren Yang; H.J. Moeller

Book ID
116606746
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
297 KB
Volume
502
Category
Article
ISSN
0925-8388

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