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Determination of the denuded zone in Czochralski-grown silicon wafers through MOS lifetime profiling

✍ Scribed by Paz, O.; Schneider, C.P.

Book ID: 114595458
Publisher: IEEE
Year: 1985
Tongue: English
Weight: 936 KB
Volume: 32
Category: Article
ISSN: 0018-9383
DOI: 10.1109/t-ed.1985.22423

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