✦ LIBER ✦
Determination of Oxygen Concentration in Single-Side Polished Czochralski-Grown Silicon Wafers by p-Polarized Brewster Angle Incidence Infrared Spectroscopy
✍ Scribed by Shirai, Hiroshi
- Book ID
- 121687231
- Publisher
- The Electrochemical Society
- Year
- 1991
- Tongue
- English
- Weight
- 412 KB
- Volume
- 138
- Category
- Article
- ISSN
- 0013-4651
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