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Influence of metal additions on silicon during hydrogen evolution

✍ Scribed by A.Q. Contractor; M. Szklarczyk; J.O'M. Bockris


Book ID
108343700
Publisher
Elsevier Science
Year
1983
Weight
138 KB
Volume
157
Category
Article
ISSN
0022-0728

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Microstructure evolution of hydrogen-imp
✍ Jing Wang; Qinghua Xiao; Hailing Tu; Beiling Shao; Ansheng Liu πŸ“‚ Article πŸ“… 2003 πŸ› Elsevier Science 🌐 English βš– 795 KB

The microstructure evolution of a hydrogen-implanted Si(111) wafer during annealing was studied using transmission electron microscopy (TEM). In the damaged layer caused by hydrogen implantation before annealing, most defects are platelet-like and are located on (111) planes. A few amorphous clumps